The chemistry of metal CVD
by
 
Kodas, Toivo T. (Toivo Tarmo), 1958-

Title
: 
The chemistry of metal CVD

Author
: 
Kodas, Toivo T. (Toivo Tarmo), 1958-

ISBN
: 
9783527615858

Publication Information
: 
Weinheim ; New York : VCH, c1994.

Physical Description
: 
xxiv, 530 p. : ill. ; 25 cm.

Subject Term
: 
Electronic circuit design.
 
Chemical vapor deposition.
 
Metallic films.

Added Author
: 
Kodas, Toivo T. (Toivo Tarmo), 1958-
 
Hampden-Smith, Mark J.

Added Corporate Author
: 
Wiley InterScience (Online service)

Electronic Access
: 
John Wiley http://dx.doi.org/10.1002/9783527615858


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book300770-1001ONLINEElektronik Kütüphane