Cover image for Introduction to microfabrication
Title:
Introduction to microfabrication
Author:
Franssila, Sami.
ISBN:
9781119990413

9780470666722
Edition:
2nd ed.
Publication Information:
Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Physical Description:
1 online resource (xiv, 518 p.) : ill.
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