Cover image for Design and Manufacturing of Active Microsystems
Title:
Design and Manufacturing of Active Microsystems
Author:
Büttgenbach, Stephanus. editor.
ISBN:
9783642129032
Physical Description:
XII, 444 p. online resource.
Series:
Microtechnology and MEMS,
Series Title:
Microtechnology and MEMS, 1615-8326
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E-Book 192150-2001 ONLINE
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