Cover image for Nanofabrication handbook
Title:
Nanofabrication handbook
Author:
Cabrini, Stefano.
ISBN:
9781420090536
Publication Information:
Boca Raton, Fla. : CRC Press, c2012.
Physical Description:
xv, 518 p. : ill., ports.
Contents:
pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
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