Cover image for MEMS introduction and fundamentals
Title:
MEMS introduction and fundamentals
Author:
Gad-el-Hak, Mohamed, 1945-
ISBN:
9781420036572
Edition:
2nd ed.
Publication Information:
Boca Raton : CRC/Taylor & Francis, 2006.
Physical Description:
488 p. : ill.
Series:
Mechanical engineering series

The MEMS handbook
Series Title:
Mechanical engineering series

The MEMS handbook
Subject Term:
Microelectromechanical systems.

Microelectronics.

Nanotechnology.
Added Author:
Gad-el-Hak, Mohamed, 1945-
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