Cover image for Handbook of chemicals and gases for the semiconductor industry
Title:
Handbook of chemicals and gases for the semiconductor industry
Author:
Miśra, Āśutosha, 1970-
ISBN:
9780471316718

9780471263852
Publication Information:
New York : Wiley-VCH, c2002.
Physical Description:
1 online resource (xiii, 363 p.) : ill.
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