Cover image for Handbook of VLSI microlithography principles, technology, and applications
Title:
Handbook of VLSI microlithography principles, technology, and applications
Author:
Glendinning, William B.
ISBN:
9780815512813

9781437728224
Publication Information:
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1991.
Physical Description:
1 online resource (xxii, 649 pages) : illustrations.
Series:
Materials science and process technology series
Series Title:
Materials science and process technology series
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