Cover image for Handbook of VLSI microlithography principles, technology, and applications
Title:
Handbook of VLSI microlithography principles, technology, and applications
Author:
Helbert, John N.
ISBN:
9781591242758

9780815514442

9780815517795
Edition:
2nd ed.
Publication Information:
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., c2001.
Physical Description:
1 online resource (xxi, 1001 p.) : ill.
Series:
Materials science and process technology series. Electronic materials and process technology
Series Title:
Materials science and process technology series. Electronic materials and process technology
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