Title:
Low Pressure Plasmas and Microstructuring Technology
Author:
Franz, Gerhard. author.
ISBN:
9783540858492
Physical Description:
online resource.
Added Corporate Author:
Electronic Access:
http://dx.doi.org/10.1007/978-3-540-85849-2Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 188789-2001 | ONLINE | Searching... | Searching... |