Title:
Enabling technology for MEMS and nanodevices
Author:
Baltes, H. (Henry)
ISBN:
9783527616701
9783527616923
Publication Information:
Weinheim [Germany] : Wiley-VCH, c2004.
Physical Description:
1 online resource (xii, 427 p.) : ill.
Series:
Advanced micro & nanosystems ; v. 1
Series Title:
Advanced micro & nanosystems ; v. 1
Added Author:
Added Corporate Author:
Electronic Access:
John Wiley http://dx.doi.org/10.1002/9783527616701HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
Copies:
Available:*
Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 302266-1001 | ONLINE | Searching... | Searching... |