Polymers in microlithography : materials and processes
by
Reichmanis, Elsa, 1953-, ed.
Title
:
Polymers in microlithography : materials and processes
Author
:
Reichmanis, Elsa, 1953-, ed.
ISBN
:
9780841217010
Publication Information
:
Washington : American Chemical Society, 1989.
Physical Description
:
xii, 449 s.
Series
:
ACS symposium series ; 412.
Series Title
:
ACS symposium series ; 412.
Subject Term
:
Polimerler -- Kongreler.
Fotorezistler -- Kongreler.
Mikroelektronik -- Gereçler -- Kongreler.
Polymers -- Congresses.
Photoresists -- Congresses.
Microlithography -- Materials -- Congresses.
Added Author
:
Reichmanis, Elsa, 1953-, ed.
MacDonald, Scott A., ed.
Iwayanagi, Takao, 1949-, ed.
Added Corporate Author
:
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Beytepe Library | Book | 7.2/12/426333 | TK7871.15.P6 P635 1989 | | Beytepe Genel Koleksiyon |