Polymers in microlithography : materials and processes
by
 
Reichmanis, Elsa, 1953-, ed.

Title
: 
Polymers in microlithography : materials and processes

Author
: 
Reichmanis, Elsa, 1953-, ed.

ISBN
: 
9780841217010

Publication Information
: 
Washington : American Chemical Society, 1989.

Physical Description
: 
xii, 449 s.

Series
: 
ACS symposium series ; 412.

Series Title
: 
ACS symposium series ; 412.

Subject Term
: 
Polimerler -- Kongreler.
 
Fotorezistler -- Kongreler.
 
Mikroelektronik -- Gereçler -- Kongreler.
 
Polymers -- Congresses.
 
Photoresists -- Congresses.
 
Microlithography -- Materials -- Congresses.

Added Author
: 
Reichmanis, Elsa, 1953-, ed.
 
MacDonald, Scott A., ed.
 
Iwayanagi, Takao, 1949-, ed.

Added Corporate Author
: 
American Chemical Society. Division of Polymeric Materials: Science and Engineering.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/12/426333TK7871.15.P6 P635 1989Beytepe Genel Koleksiyon