Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
by
 
Lyshevski, Sergey Edward.

Title
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering

Author
Lyshevski, Sergey Edward.

ISBN
9780849328381

Publication Information
Boca Raton : CRC Press, 2005.

Physical Description
338 s. : res.

Series
Nano- and microscience, engineering, technology, and medicine series.

Series Title
Nano- and microscience, engineering, technology, and medicine series.

Subject Term
MİKROELEKTROMEKANİK SİSTEMLER
 
Microelectromechanical systems.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/12/502190TK7875 .L96 2005Beytepe Genel Koleksiyon