Polymers for microelectronics : resists and dielectrics
by
 
Thompson, L. F., 1944-

Title
: 
Polymers for microelectronics : resists and dielectrics

Author
: 
Thompson, L. F., 1944-

ISBN
: 
9780841227217

Publication Information
: 
Washington : American Chemical Society, 1994.

Physical Description
: 
xii, 571 s. : şkl.

Series
: 
ACS symposium series, 0097-6156 ;

Series Title
: 
ACS symposium series, 0097-6156 ; 537

Subject Term
: 
Mikroelektronik -- Maddele -- Kongreler.
 
Polimerler -- Kongreler.
 
Microelectronics -- Materials -- Congresses.
 
Polymers -- Congresses.

Added Author
: 
Thompson, L. F., 1944-
 
Willson, C. G. (C. Grant) 1939-
 
Tagawa, Seiichi.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/12/426332TK7871.15.P6 P65 1994Beytepe Genel Koleksiyon