Handbook of silicon based MEMS materials & technologies
by
 
Lindroos, Veikko.

Title
: 
Handbook of silicon based MEMS materials & technologies

Author
: 
Lindroos, Veikko.

ISBN
: 
9780815515944
 
9781282541146

Publication Information
: 
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2010.

Physical Description
: 
1 online resource.

Subject Term
: 
Microelectromechanical systems.
 
Microelectromechanical systems -- Materials.
 
Silicon -- Electric properties.

Added Author
: 
Lindroos, Veikko.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515944


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book145533-2001ONLINEElektronik Kütüphane