Fundamental principles of engineering nanometrology
by
 
Leach, R. K.

Title
: 
Fundamental principles of engineering nanometrology

Author
: 
Leach, R. K.

ISBN
: 
9780080964546
 
9781437778328

Edition
: 
1st ed.

Publication Information
: 
Oxford : William Andrew ; Amsterdam : Elsevier Science, c2010.

Physical Description
: 
1 online resource (xxvi, 321 p.) : ill.

Series
: 
Micro and nano technologies

Series Title
: 
Micro and nano technologies

Subject Term
: 
Nanotechnology.
 
Microtechnology.
 
Metrology.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780080964546


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book145816-2001ONLINEElektronik Kütüphane