Fabrication and design of resonant microdevices
by
 
Bahreyni, Behraad.

Title
: 
Fabrication and design of resonant microdevices

Author
: 
Bahreyni, Behraad.

ISBN
: 
9780815515777
 
9780815517115

Publication Information
: 
Norwich, NY : W. Andrew Inc., c2008.

Physical Description
: 
1 online resource (xiii, 181 p.) : ill.

Series
: 
Micro & nano technologies ; 3

Series Title
: 
Micro & nano technologies ; 3

Subject Term
: 
Microelectromechanical systems -- Design and construction.
 
Microfabrication.
 
Resonance.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515777


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book145887-2001ONLINEElektronik Kütüphane