Ceramic thick films for MEMS and microdevices
by
 
Dorey, Robert A.

Title
: 
Ceramic thick films for MEMS and microdevices

Author
: 
Dorey, Robert A.

ISBN
: 
9781437778182
 
9781437778175

Publication Information
: 
Norwich, N.Y. : William Andrew ; Oxford : Elsevier Science [distributor], 2011.

Physical Description
: 
1 online resource (1 v.)

Series
: 
Micro and nano technologies series

Series Title
: 
Micro and nano technologies series

Subject Term
: 
Thick-film circuits -- Design and construction.
 
Microelectromechanical systems -- Design and construction.
 
Nanoelectronics.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9781437778175


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book148708-2001ONLINEElektronik Kütüphane