Introductory MEMS Fabrication and Applications
by
 
Adams, Thomas M. author.

Title
: 
Introductory MEMS Fabrication and Applications

Author
: 
Adams, Thomas M. author.

ISBN
: 
9780387095110

Edition
: 
1.

Physical Description
: 
XV, 444p. 50 illus., 25 illus. in color. online resource.

Subject Term
: 
Engineering.
 
Mechanics.
 
Materials.
 
Electronics.
 
Systems engineering.
 
Surfaces (Physics).

Added Author
: 
Layton, Richard A.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/978-0-387-09511-0


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book164671-2001ONLINEElektronik Kütüphane