Electroceramic-Based MEMS Fabrication-Technology and Applications
by
 
Setter, Nava. editor.

Title
Electroceramic-Based MEMS Fabrication-Technology and Applications

Author
Setter, Nava. editor.

ISBN
9780387233192

Physical Description
XII, 414 p. online resource.

Series
Electronic Materials: Science and Technology, 9

Series Title
Electronic Materials: Science and Technology, 1386-3290 ; 9

Subject Term
Chemistry.
 
Electronics.
 
Optical materials.
 
Nanotechnology.
 
Surfaces (Physics).

Added Corporate Author
SpringerLink (Online service)

Electronic Access
http://dx.doi.org/10.1007/b101200


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book164895-2001ONLINEElektronik Kütüphane