Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
by
Laconte, J. author.
Title
:
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Author
:
Laconte, J. author.
ISBN
:
9780387288437
Physical Description
:
XIII, 292 p. online resource.
Subject Term
:
Engineering.
Particles (Nuclear physics).
Physical optics.
Electronics.
Systems engineering.
Surfaces (Physics).
Added Author
:
Flandre, D.
Raskin, J. -P.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 165572-2001 | ONLINE | | Elektronik Kütüphane |