MEMS Materials and Processes Handbook
by
 
Ghodssi, Reza. editor.

Title
: 
MEMS Materials and Processes Handbook

Author
: 
Ghodssi, Reza. editor.

ISBN
: 
9780387473185

Physical Description
: 
XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. online resource.

Series
: 
MEMS Reference Shelf, 1

Series Title
: 
MEMS Reference Shelf, 1936-4407 ; 1

Subject Term
: 
Engineering.
 
Electronics.
 
Systems engineering.
 
Materials.
 
Surfaces (Physics).

Added Author
: 
Lin, Pinyen.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/978-0-387-47318-5


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book166368-2001ONLINEElektronik Kütüphane