Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing
by
 
Gao, Wei. author.

Title
: 
Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

Author
: 
Gao, Wei. author.

ISBN
: 
9781849962544

Physical Description
: 
XIV, 355p. 337 illus. online resource.

Series
: 
Springer Series in Advanced Manufacturing, 0

Series Title
: 
Springer Series in Advanced Manufacturing, 1860-5168 ; 0

Subject Term
: 
Engineering.
 
Control engineering systems.
 
Machinery.
 
Nanotechnology.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/978-1-84996-254-4


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book176200-2001ONLINEElektronik Kütüphane