Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
by
 
Frühauf, Joachim. author.

Title
: 
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

Author
: 
Frühauf, Joachim. author.

ISBN
: 
9783540268765

Physical Description
: 
XII, 221 p. 165 illus. online resource.

Subject Term
: 
Chemistry.
 
Chemical engineering.
 
Microwaves.
 
Electronics.
 
Optical materials.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/b138230


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book181056-2001ONLINEElektronik Kütüphane