Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
by
Frühauf, Joachim. author.
Title
:
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures
Author
:
Frühauf, Joachim. author.
ISBN
:
9783540268765
Physical Description
:
XII, 221 p. 165 illus. online resource.
Subject Term
:
Chemistry.
Chemical engineering.
Microwaves.
Electronics.
Optical materials.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 181056-2001 | ONLINE | | Elektronik Kütüphane |