Reactive Sputter Deposition
by
 
Depla, Diederik. editor.

Title
: 
Reactive Sputter Deposition

Author
: 
Depla, Diederik. editor.

ISBN
: 
9783540766643

Physical Description
: 
online resource.

Series
: 
Springer Series in Materials Science, 109

Series Title
: 
Springer Series in Materials Science, 0933-033X ; 109

Subject Term
: 
Chemistry.
 
Chemistry, Physical organic.
 
Chemical engineering.
 
Surfaces (Physics).

Added Author
: 
Mahieu, Stijn.

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/978-3-540-76664-3


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book187650-2001ONLINEElektronik Kütüphane