Low Pressure Plasmas and Microstructuring Technology
by
 
Franz, Gerhard. author.

Title
: 
Low Pressure Plasmas and Microstructuring Technology

Author
: 
Franz, Gerhard. author.

ISBN
: 
9783540858492

Physical Description
: 
online resource.

Subject Term
: 
Materials.
 
Molecular structure.
 
Electronics.
 
Optical materials.
 
Surfaces (Physics).

Added Corporate Author
: 
SpringerLink (Online service)

Electronic Access
: 
http://dx.doi.org/10.1007/978-3-540-85849-2


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book188789-2001ONLINEElektronik Kütüphane