Design and Manufacturing of Active Microsystems
by
Büttgenbach, Stephanus. editor.
Title
:
Design and Manufacturing of Active Microsystems
Author
:
Büttgenbach, Stephanus. editor.
ISBN
:
9783642129032
Physical Description
:
XII, 444 p. online resource.
Series
:
Microtechnology and MEMS,
Series Title
:
Microtechnology and MEMS, 1615-8326
Subject Term
:
Engineering.
Structural control (Engineering).
Nanotechnology.
Added Author
:
Burisch, Arne.
Hesselbach, Jürgen.
Added Corporate Author
:
SpringerLink (Online service)
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 192150-2001 | ONLINE | | Elektronik Kütüphane |