Plasma processing of semiconductors
by
 
Williams, P. Frazer, ed.

Title
: 
Plasma processing of semiconductors

Author
: 
Williams, P. Frazer, ed.

ISBN
: 
9780792345671

Publication Information
: 
Dordrecht : Kluwer Academic, 1997.

Physical Description
: 
x, 613 s.

Series
: 
NATO ASI Series. Series E : Applied Sciences - vol. 336

Series Title
: 
NATO ASI Series. Series E : Applied Sciences - vol. 336

General Note
: 
"Proocedings of the NATO Advanced Study Institute on Plasma... Chateau de Bonas, France, 17-28 June, 1996"

Subject Term
: 
PLAZMA MÜHENDİSLİĞİ.
 
YARIİLETKENLER -- EKIYILAMA.

Added Author
: 
Williams, P. Frazer, ed.


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Beytepe LibraryBook7.2/12/591797TA 2020 P532 1997Beytepe Genel Koleksiyon
Beytepe LibraryBook7.2/12/591798TA 2020 P532 1997Beytepe Genel Koleksiyon