Process Technology for Silicon Carbide Devices
by
Zetterling, Carl-Mikael, ed.
Title
:
Process Technology for Silicon Carbide Devices
Author
:
Zetterling, Carl-Mikael, ed.
ISBN
:
9781849193719
Publication Information
:
Stevenage : IET, 2002.
Physical Description
:
1 online resource (200 p.)
Series
:
Circuits, Devices and Systems
Series Title
:
Circuits, Devices and Systems
Subject Term
:
Dielectrics.
Diffusion.
Diodes, Schottky-barrier.
Electronic apparatus and appliances.
Epitaxy.
Etching.
Ion implantation.
Micromechanics.
Ohmic contacts.
Power semiconductors.
Semiconductors.
Semiconductors--Junctions.
Silicon compounds.
Wide gap semiconductors.
Added Author
:
Zetterling, Carl-Mikael,
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 247778-1001 | ONLINE | | Elektronik Kütüphane |