Micromechanics and MEMS classic and seminal papers to 1990
by
Trimmer, W.
Title
:
Micromechanics and MEMS classic and seminal papers to 1990
Author
:
Trimmer, W.
ISBN
:
9780470545263
Publication Information
:
New York : IEEE Press, 1997.
Physical Description
:
1 online resource (xv, 701 p.) : ill.
Subject Term
:
Microelectronics.
Microelectromechanical systems.
Actuators.
Capteurs (technologie)
Micromécanique.
Dispositifs électromécaniques.
Genre
:
Electronic books.
Added Author
:
Trimmer, W.
Added Corporate Author
:
Institute of Electrical and Electronics Engineers.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 249592-1001 | ONLINE | | Elektronik Kütüphane |