Principles of MEMS
by
 
Lee, Ki Bang.

Title
: 
Principles of MEMS

Author
: 
Lee, Ki Bang.

ISBN
: 
9780470649671

Publication Information
: 
Hoboken, N.J. : WILEY, c2010.

Physical Description
: 
1 online resource (xii, 667 p.) : ill.

Subject Term
: 
Microelectromechanical systems.

Genre
: 
Electronic books.

Electronic Access
: 
IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book249894-1001ONLINEElektronik Kütüphane