Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control
by
Mattox, D. M.
Title
:
Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control
Author
:
Mattox, D. M.
ISBN
:
9780815514220
Publication Information
:
Westwood, N.J. : Noyes Publications, c1998.
Physical Description
:
1 online resource (xxvii, 917 p.) : ill.
Subject Term
:
Physical vapor deposition -- Handbooks, manuals, etc.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 252058-1001 | ONLINE | | Elektronik Kütüphane |