High density plasma sources design, physics, and performance
by
 
Popov, Oleg A.

Title
: 
High density plasma sources design, physics, and performance

Author
: 
Popov, Oleg A.

ISBN
: 
9780815513773

Publication Information
: 
Park Ridge, N.J. : Noyes Publications, c1995.

Physical Description
: 
1 online resource (xx, 445 p.) : ill.

Series
: 
Materials science and process technology series

Series Title
: 
Materials science and process technology series

Subject Term
: 
Plasma density.
 
Plasma generators.
 
High temperature plasmas.

Added Author
: 
Popov, Oleg A.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815513773


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book252065-1001ONLINEElektronik Kütüphane