Handbook of VLSI microlithography principles, technology, and applications
by
Helbert, John N.
Title
:
Handbook of VLSI microlithography principles, technology, and applications
Author
:
Helbert, John N.
ISBN
:
9781591242758
9780815514442
9780815517795
Edition
:
2nd ed.
Publication Information
:
Park Ridge, N.J. : Noyes Publications ; Norwich, N.Y. : William Andrew Pub., c2001.
Physical Description
:
1 online resource (xxi, 1001 p.) : ill.
Series
:
Materials science and process technology series. Electronic materials and process technology
Series Title
:
Materials science and process technology series. Electronic materials and process technology
Subject Term
:
Integrated circuits -- Very large scale integration.
Microlithography.
Genre
:
Electronic books.
Added Author
:
Helbert, John N.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 254148-1001 | ONLINE | | Elektronik Kütüphane |