Interlayer dielectrics for semiconductor technologies
by
 
Murarka, S. P.

Title
: 
Interlayer dielectrics for semiconductor technologies

Author
: 
Murarka, S. P.

ISBN
: 
9780125112215
 
9780080521954

Publication Information
: 
Amsterdam ; Boston : Elsevier/Academic Press, 2003.

Physical Description
: 
1 online resource (xiv, 444 p.) : ill.

Subject Term
: 
Semiconductor wafers.
 
Dielectrics.

Added Author
: 
Murarka, S. P.
 
Eizenberg, M. (Moshe)
 
Sinha, A. K. (Ashok K.)

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780125112215


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254286-1001ONLINEElektronik Kütüphane