Analysis and design principles of MEMS devices
by
 
Bao, Min-Hang.

Title
: 
Analysis and design principles of MEMS devices

Author
: 
Bao, Min-Hang.

ISBN
: 
9780444516169
 
9780080455624

Publication Information
: 
Amsterdam ; Boston ; London : Elsevier, 2005.

Physical Description
: 
1 online resource (xii, 312 p.) : ill.

Subject Term
: 
Microelectromechanical systems.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780444516169


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254385-1001ONLINEElektronik Kütüphane