Micro mechanical systems principles and technology
by
 
Fukuda, T. (Toshio), 1948-

Title
: 
Micro mechanical systems principles and technology

Author
: 
Fukuda, T. (Toshio), 1948-

ISBN
: 
9780444823632

Publication Information
: 
Amsterdam ; New York : Elsevier, 1998.

Physical Description
: 
1 online resource (viii, 268 p.) : ill.

Series
: 
Handbook of sensors and actuators ; v. 6

Series Title
: 
Handbook of sensors and actuators ; v. 6

Subject Term
: 
Microelectromechanical systems -- Handbooks, manuals, etc.

Added Author
: 
Fukuda, T. (Toshio), 1948-
 
Menz, W. (Wolfgang)

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780444823632


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254604-1001ONLINEElektronik Kütüphane