Handbook of VLSI microlithography principles, technology, and applications
by
 
Glendinning, William B.

Title
: 
Handbook of VLSI microlithography principles, technology, and applications

Author
: 
Glendinning, William B.

ISBN
: 
9780815512813
 
9781437728224

Publication Information
: 
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1991.

Physical Description
: 
1 online resource (xxii, 649 pages) : illustrations.

Series
: 
Materials science and process technology series

Series Title
: 
Materials science and process technology series

Subject Term
: 
Integrated circuits -- Very large scale integration.
 
Microlithography.
 
Lithographie (Halbleitertechnologie)
 
Photolithographie (Halbleitertechnologie)
 
VLSI.

Added Author
: 
Glendinning, William B.
 
Helbert, John N.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780815512813


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254921-1001ONLINEElektronik Kütüphane