Handbook of VLSI microlithography principles, technology, and applications
by
Glendinning, William B.
Title
:
Handbook of VLSI microlithography principles, technology, and applications
Author
:
Glendinning, William B.
ISBN
:
9780815512813
9781437728224
Publication Information
:
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1991.
Physical Description
:
1 online resource (xxii, 649 pages) : illustrations.
Series
:
Materials science and process technology series
Series Title
:
Materials science and process technology series
Subject Term
:
Integrated circuits -- Very large scale integration.
Microlithography.
Lithographie (Halbleitertechnologie)
Photolithographie (Halbleitertechnologie)
VLSI.
Added Author
:
Glendinning, William B.
Helbert, John N.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 254921-1001 | ONLINE | | Elektronik Kütüphane |