Electron-beam technology in microelectronic fabrication
by
 
Brewer, George Raymond, 1922-

Title
: 
Electron-beam technology in microelectronic fabrication

Author
: 
Brewer, George Raymond, 1922-

ISBN
: 
9780121335502
 
9780323153416

Publication Information
: 
New York : Academic Press, 1980.

Physical Description
: 
1 online resource (xi, 362 pages) : illustrations

Subject Term
: 
Microelectronics.
 
Lithography, Electron beam.
 
Elektronenstrahllithographie.
 
Mikroelektronik.

Added Author
: 
Brewer, George Raymond, 1922-
 
Ballantyne, J. P.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780121335502


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254924-1001ONLINEElektronik Kütüphane