Laser microfabrication thin film processes and lithography
by
Ehrlich, Daniel J.
Title
:
Laser microfabrication thin film processes and lithography
Author
:
Ehrlich, Daniel J.
ISBN
:
9780122334306
Publication Information
:
Boston : Academic Press, c1989.
Physical Description
:
1 online resource (xii, 587 p.) : ill.
Subject Term
:
Lasers -- Industrial applications.
Thin film devices -- Design and construction.
Microlithography.
Microfabrication.
Added Author
:
Ehrlich, Daniel J.
Tsao, Jeffrey Y.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 254996-1001 | ONLINE | | Elektronik Kütüphane |