Laser microfabrication thin film processes and lithography
by
 
Ehrlich, Daniel J.

Title
: 
Laser microfabrication thin film processes and lithography

Author
: 
Ehrlich, Daniel J.

ISBN
: 
9780122334306

Publication Information
: 
Boston : Academic Press, c1989.

Physical Description
: 
1 online resource (xii, 587 p.) : ill.

Subject Term
: 
Lasers -- Industrial applications.
 
Thin film devices -- Design and construction.
 
Microlithography.
 
Microfabrication.

Added Author
: 
Ehrlich, Daniel J.
 
Tsao, Jeffrey Y.

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780122334306


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book254996-1001ONLINEElektronik Kütüphane