Ion implantation in semiconductors, silicon and germanium
by
Mayer, James W., 1930-
Title
:
Ion implantation in semiconductors, silicon and germanium
Author
:
Mayer, James W., 1930-
ISBN
:
9780124808508
9780323157216
Publication Information
:
New York, Academic Press, 1970.
Physical Description
:
1 online resource (xiii, 280 pages) illustrations
Subject Term
:
Ion implantation.
Semiconductors.
Halbleiter.
Ionenimplantation.
Added Author
:
Eriksson, Lennart, 1938-
Davies, John Arthur, 1927-
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 255008-1001 | ONLINE | | Elektronik Kütüphane |