Ion implantation in semiconductors, silicon and germanium
by
 
Mayer, James W., 1930-

Title
: 
Ion implantation in semiconductors, silicon and germanium

Author
: 
Mayer, James W., 1930-

ISBN
: 
9780124808508
 
9780323157216

Publication Information
: 
New York, Academic Press, 1970.

Physical Description
: 
1 online resource (xiii, 280 pages) illustrations

Subject Term
: 
Ion implantation.
 
Semiconductors.
 
Halbleiter.
 
Ionenimplantation.

Added Author
: 
Eriksson, Lennart, 1938-
 
Davies, John Arthur, 1927-

Electronic Access
: 
ScienceDirect http://www.sciencedirect.com/science/book/9780124808508


LibraryMaterial TypeItem BarcodeShelf Number[[missing key: search.ChildField.HOLDING]]Status
Online LibraryE-Book255008-1001ONLINEElektronik Kütüphane