Epitaxial silicon technology
by
Baliga, B. Jayant, 1948-
Title
:
Epitaxial silicon technology
Author
:
Baliga, B. Jayant, 1948-
ISBN
:
9780120771202
Publication Information
:
Orlando : Academic Press, 1986.
Physical Description
:
1 online resource (viii, 328 pages) : illustrations
Subject Term
:
Semiconductors -- Design and construction.
Silicon crystals -- Growth.
Epitaxy.
Silicon-on-insulator technology.
Epitaxie.
Silicium.
Added Author
:
Baliga, B. Jayant, 1948-
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 255021-1001 | ONLINE | | Elektronik Kütüphane |