Plasma etching an introduction
by
Manos, Dennis M.
Title
:
Plasma etching an introduction
Author
:
Manos, Dennis M.
ISBN
:
9780080924465
Publication Information
:
Boston : Academic Press, c1989.
Physical Description
:
1 online resource (xii, 476 p.) : ill.
Series
:
Plasma -- materials interactions
Series Title
:
Plasma -- materials interactions
Subject Term
:
Plasma etching.
Added Author
:
Manos, Dennis M.
Flamm, Daniel L.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 255208-1001 | ONLINE | | Elektronik Kütüphane |