Fine line lithography
by
Newman, Roger.
Title
:
Fine line lithography
Author
:
Newman, Roger.
ISBN
:
9780444853516
9780444601285
9781299537200
Publication Information
:
Amsterdam ; New York : North-Holland Pub. Co. ; New York : Sole distributor for the USA and Canada, Elsevier North-Holland, 1980.
Physical Description
:
1 online resource (vii, 481 pages).
Series
:
Materials processing, theory and practices ; v. 1
Series Title
:
Materials processing, theory and practices ; v. 1
Subject Term
:
Integrated circuits -- Large scale integration.
Lithography.
Integrierte Schaltung.
Photolithographie (Halbleitertechnologie)
Genre
:
Electronic books.
Added Author
:
Newman, Roger.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 256117-1001 | ONLINE | | Elektronik Kütüphane |