Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
by
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
Title
:
Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
Author
:
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
ISBN
:
9780444596918
Conference Author
:
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)
Publication Information
:
Amsterdam : North-Holland, 1993.
Physical Description
:
1 online resource (xiv, 338 p.) : ill.
Series
:
European Materials Research Society symposia proceedings ; v. 34
Series Title
:
European Materials Research Society symposia proceedings ; v. 34
Subject Term
:
Semiconductors -- Analysis -- Congresses.
Semiconductors -- Quality control -- Congresses.
Semiconductors -- Optical properties -- Congresses.
Halbleiter.
Herstellung.
Kongress.
Prozessüberwachung.
Genre
:
Strassburg (1992)
Added Author
:
Crean, G. M.
Stuck, R.
Woollam, John A.
Added Corporate Author
:
European Materials Research Society.
Electronic Access
:
| Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
|---|
| Online Library | E-Book | 256273-1001 | ONLINE | | Elektronik Kütüphane |