Ionized physical vapor deposition
by
Hopwood, Jeffrey A.
Title
:
Ionized physical vapor deposition
Author
:
Hopwood, Jeffrey A.
ISBN
:
9780125330275
Publication Information
:
San Diego : Academic Press, c2000.
Physical Description
:
1 online resource (xii, 253 p.) : ill.
Series
:
Thin films ; v. 27
Series Title
:
Thin films ; v. 27
Subject Term
:
Thin film devices -- Design and construction.
Physical vapor deposition.
Thin films.
Genre
:
Electronic books.
Added Author
:
Hopwood, Jeffrey A.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | [[missing key: search.ChildField.HOLDING]] | Status |
---|
Online Library | E-Book | 256314-1001 | ONLINE | | Elektronik Kütüphane |